Restricted Research - Award List, Note/Discussion Page

Fiscal Year: 2013

52  The University of Texas at Dallas  (19530)

Principal Investigator: Hinkle,Christopher L

Total Amount of Contract, Award, or Gift (Annual before 2011): $ 250,000

Exceeds $250,000 (Is it flagged?): Yes

Start and End Dates: 7/1/12 <> 6/30/13

Restricted Research: YES

Academic Discipline: Materials Sci

Department, Center, School, or Institute: ECS

Title of Contract, Award, or Gift: Extraction of CV Parameters for III-V/High-k Devices

Name of Granting or Contracting Agency/Entity: SEMICONDUCTOR RESEARCH CORP

Program Title: none


Development of high-quality advanced gate dielectrics on Si, from thin Si02, to oxynitrides, and more recently to high-k materials, was facilitated by the ability to measure the electrical characteristics of the gate stack quickly by employing a minimum amount of post-gae oxide device fabrication.

Discussion: No discussion notes


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